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Field Service Solutions | |||||||||
Copyright © 2004 Enigma, Inc. | |||||||||
Tuesday, December 9, 2003 | |||||||||
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ID # | Fab | Process | Customer | Status | Owner | Customer Owner |
990621 | 4 | CMP | TI | Up/26-Nov-03 | | |
689726 | 4 | CMP | TI | Down(T)/27-Nov-03 | JE Lee | Steve Vaughn |
597846 | 6 | CVD | Intel | Down(Ch)/ 22-Nov-03 | Francis Zapah | Alex Zivojinovic |
4 | PECVD | TI | Up/08-Nov-03 | | |
08Nov03 | Identified within-wafer uniformity problem due to misalignment of ceramic gas injector. Realigned injector & requalified tool. |
27Nov03 | OCAPs for Tool 364462 not complete |
20Nov03 | Tool 364462 down |
12Nov03 | Parts ordered insufficient to complete PM |
Date | Cycle Time | Hours | Labor $ | Mat. $ | MTTR |
08Nov03 | 1 day | 2 | 0.2 | 0.1 | X |
23Oct03 | 4 days | 12 | 1.9 | 0.6 | X |
09Sep03 | 32 days | 235 | 24.8 | 7.2 | X |
07Jun03 | 3 days | 28 | 4.2 | 0.3 | X |
19Apr03 | 7 days | 16 | 2.1 | | X |
14Apr03 | 5 days | 35 | 4.7 | | X |
17Mar03 | 2 days | 8 | 1.0 | 4.0 | X |
I / PM / CM / R
MAINTENANCE HISTORY - 364462
20Nov03 | Slit valve retrofit available |
15Nov03 | Over-tightening of gas fitting #234-0987 may result in leak |
26Oct03 | Controller board may short out |
04Aug03 | Reduced cost for 200mm CVD PM kit |
Notices / Safety
NOTICES - All Machines
Week - Month - Quarter - YEAR
MACHINE MAINTENANCE PROFILE - 364462
EVENT - 24 hours - 48 hours - Week - Month
PASSDOWN - 364462
MACHINES - Parts - Products - Teams
MY MACHINES - 364462
Notifications / Escalations
ALERTS
*** The Last Mile in Field Service ***