
ID # | Fab | Process | Customer | Status | Owner | Customer Owner |
990621 | 4 | CMP | TI | Up/26-Nov-03 | ||
689726 | 4 | CMP | TI | Down(T)/27-Nov-03 | JE Lee | Steve Vaughn |
597846 | 6 | CVD | Intel | Down(Ch)/ 22-Nov-03 | Francis Zapah | Alex Zivojinovic |
4 | PECVD | TI | Up/08-Nov-03 |
PASSDOWN
*** The Last Mile in Field Service ***
27Nov03 | OCAPs for Tool 364462 not complete |
20Nov03 | Tool 364462 down |
12Nov03 | Parts ordered insufficient to complete PM |
Date | Cycle Time | Hours | Labor $ | Mat. $ | MTTR |
PM / CM
MAINTENANCE HISTORY
20Nov03 | Slit valve retrofit available |
15Nov03 | Over-tightening of gas fitting #234-0987 may result in leak |
26Oct03 | Controller board may short out |
04Aug03 | Reduced cost for 200mm CVD PM kit |
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